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Serviced by GCE
Canon BG4-6746
WF/RC IF PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Spare Parts Catalog
Find the part — search by equipment, condition, and availability.
A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.
0 systems
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Serviced by GCE
Canon BG4-6748
P2 Back Plane PCB Assembly
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-6751
Reticle Robot Hand, 6in
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG4-6755
SH PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6763
Pre-Aligner, 8in, Notch
Compatibility
Canon FPA-3000
Condition
Removed from working system
Serviced by GCE
Canon BG4-6764
End effector, 3in - 4in
Compatibility
Canon FPA-3000
Condition
New
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Serviced by GCE
Canon BG4-6765
End effector, 5in - 8in
Compatibility
Canon FPA-3000
Condition
New
Serviced by GCE
Canon BG4-6777
Feed Hand Unit (Type 6 L)
Compatibility
Canon FPA-3000
Condition
Removed from working system
.webp)
Serviced by GCE
Canon BG4-6780
Robot, SCH (L)
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6789
WF LD/PD PCB Assembly
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6794
WF SCH/EL PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
Canon BG4-6811
PA/SH PCB
Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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