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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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Canon BG4-6745
Ready to Ship
Serviced by GCE

Canon BG4-6745

Reticle Control CPU PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6746
Ready to Ship
Serviced by GCE

Canon BG4-6746

WF/RC IF PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6748
Ready to Ship
Serviced by GCE

Canon BG4-6748

P2 Back Plane PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-6751
Ready to Ship
Serviced by GCE

Canon BG4-6751

Reticle Robot Hand, 6in

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-6755
Ready to Ship
Serviced by GCE

Canon BG4-6755

SH PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6763
Ready to Ship
Serviced by GCE

Canon BG4-6763

Pre-Aligner, 8in, Notch

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-6764
Ready to Ship
Serviced by GCE

Canon BG4-6764

End effector, 3in - 4in

Compatibility
Canon FPA-3000
Condition
New
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Canon BG4-6765
Ready to Ship
Serviced by GCE

Canon BG4-6765

End effector, 5in - 8in

Compatibility
Canon FPA-3000
Condition
New
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Canon BG4-6777
Ready to Ship
Serviced by GCE

Canon BG4-6777

Feed Hand Unit (Type 6 L)

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG4-6780
Refurbishment Service
Serviced by GCE

Canon BG4-6780

Robot, SCH (L)

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6789
Ready to Ship
Serviced by GCE

Canon BG4-6789

WF LD/PD PCB Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG4-6794
Ready to Ship
Serviced by GCE

Canon BG4-6794

WF SCH/EL PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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