Canon Services and Consulting

GCE offers service and support for the following legacy Canon Steppers:

FPA 3000 i4, i5, i5+, iW, MR : I-line steppers
FPA 3000 EX3, EX4, EX5, EX6 : DUV steppers

This service offering includes:

  • Scheduled PM service
  • Emergency tool down service
  • Stepper relocation
  • User training
  • Maintanence training

All services are performed by our own technicians, NOT contractors. Our technicians are factory trained for maintenance and repair as well as highest level of technical support. 

Our stocked spare parts are refurbished, tested on running tools and are shipped with minimum of 3 month warranty.  OEM quality and delivery but without OEM pricing.  You can count on us to save you 25-50% from OEM pricing.  Some of the biggest Fabs already do.  More information can be found at: