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Serviced by GCE
KLA 0133889-000
Stage Controller, Equipe
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
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KLA 8100XP CD-SEM
Built for imaging and measuring at the bottom of high-aspect-ratio features.
Each tool is configured to your wafer size, wafer type, and application. All major power supplies and controllers are replaced with refurbished units, and all consumables are replaced. Final calibration and acceptance testing confirm performance meets or exceeds the original specifications.
Our field service engineers handle installation, qualification, and training at your site. After-sales support includes preventive maintenance contracts and troubleshooting when a tool goes down. All of this is backed by our comprehensive spare parts inventory, with every refurbished part fully tested on our own CD-SEMs.
Related case study: Refurbished KLA CD-SEMs reconfigured for a 3-inch InP line in three months →
Specifications
Brand
KLA
Model
CD-SEM 8100XP
Model Year
Several
Category
E-Beam Metrology
Serial Number
Several
Resolution (nm)
4
Throughput (WPH 8")
50
Wafer Sizes (inches)
3", 4", 6", 8"
Wafer types
Si, SiC, GaN, GaAs, InP, Sapphire, Quartz
Wafer Loading Stations
3
Feature Size (nm)
30
Magnification (kX)
2.34–400
Stage Accuracy (um)
10
Accelerating Voltage (kV)
0.4–1.5
Operating System
Mac, Win NT/XP
Schottky Electron source
Yes
Size/Type Mix & Match on the Fly
Yes
SMIF compatibility
Yes
Configuration / Reconfiguration
What GCE can adapt on this system.
This isn't a fixed listing. We reconfigure the tool for the process you're actually going to run — a different wafer size, a different application, a substrate the previous owner never used. Every system is refurbished to OEM spec first; the configuration work is where we match it to your line.
Wafer size
reconfigure across
3", 4", 6", 8"
Application
configured for
KLA 8100XP CD-SEM
Compound-semiconductor substrates
SiC, GaN, GaAs, InP, sapphire, quartz, where the platform supports it.
Spare Parts
Spare parts for this system
Serviced by GCE
KLA 0145906-001
Aperture Strip Assembly, 14 holes
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 0723-2024-001
IP Controller Interface Kit (with new controller)
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 130-00679-000
Feedthrough
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA 371-07734-000
Scintillator
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 460-15018-000
Image / Frame Grabber PCB
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
Serviced by GCE
KLA 471-12148-000
Zygo 7705, Laser Head
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
New
Serviced by GCE
KLA 720-02841-500
Stage Motor, Brushed
Compatibility
KLA CD-SEM (8100XP/8250)
Condition
Refurbished, fully tested, and on-tool verified
View All Spare Parts
Request this system.
In stock, refurbished to OEM spec, and demo-ready on our own line. Ask for a quote, or schedule a demo and watch it run before you commit — no obligation.
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