CANON FPA-3000 i5 Stepper For Sale

Model Year:	1998
Quantity:	1
Condition:	Refurbished system
Serial No:	7092152
Availability:	Now

Configuration:

This tool was refurbished by Canon (OEM).  It was installed in a compound semiconductor fab in 2018.  It was utilized for a few months only and removed from the fab in June 2026. 

The tool is at GCE facility in New Jersey, USA.

Wafer type: Silicon, SiC, GaN, GaAs, InP, all compound semiconductor types
Wafer size: 4" / 6" / 8"  Flat/Notch (customer may specify per their requirement)
Reticle size:  6" Square
Field Size:  22 X 22 mm

Exposure Light: 365nm
Light Source:  2.0KW Super High Pressure Hg Lamp

Projection Magnification: 1/5 X
Numerical Aperture:  0.63~0.45

illumination data taken in June 2026:
Uniformity : 1.11%
Intensity    : 9,551 w/m2

Throughput:
102 wph   (32 shots / 22 mm / 6” Wafer)
74   wph   (60 shots / 22 mm / 8” Wafer)

Optical data will be available soon !

Comments:

Installation service available Worldwide
To further discuss, please contact us