CANON FPA-3000 EX6 DUV Stepper For Sale

Model Year: N/A
Quantity: 1
Condition: Good operational condition
Serial No: Available upon request
Availability: SOLD


  • Reticle:- 6" Square
  • Wafer: 6" or 8" (for other size, please inquire)



General Specification and Information:

  • Model:  FPA 3000 EX6 (Deep Ultra Violet)
  • First year available:  1999
  • Lens Type:  ULEX26
  • Stage Type:  FLAT (Fast Liner motor air guided Transfer stage)
  • Chamber Type:  CD111(SMIF)


Projection Optics:

  • Projection Magnification:  1/5 X
  • Exposure Light:  (248nm DUV)
  • Numerical Aperture:  (0.65~0.50 in 0.01 increments)
  • Field Size:  22x22mm or 22x26mm is optional

Standard Illumination:

  • Exposure Light:  DUV (Deep Ultra Violet)
  • Light Source:  KrF Excimer Laser CYMER/ELS-5300 or KLESG10K-30
  • Intensity:  Min. 3500 w/m2
  • Uniformity:  +/- 1.2%
  • Masking Blade Accuracy:  Max. +/- 80 µm

Printing Performance:

  • Resolution:  <0.22µm or Less
  • Depth of Focus:  Min. R 0.8µm
  • Image Surface Inclination:  Min. R 0.25µm
  • Distortion:  <±0.030µm

Focus/Leveling Performance:

  • Focus Repeatability:  <0.10µm (3sigma)
  • Leveling Repeatability:  <6ppm (3sigma)
  • Minimum Compensation Range >100ppm

Standard Stage Specification:

  • Step Accuracy:  <0.030µm (3sigma)
  • Scaling:  <±0.5ppm
  • Orthogonality:  <±0.5ppm

Standard Alignment Specification:

  • Reticle Rotation Accuracy:  <±.01µm
  • Wafer Alignment:  <0.045µm mean + 3sigma
  • Reticle Rotation Repeatability:  <R0.02µm)


  • Standard Size:  6" square t=0.25" (Patticle checker)
  • Material:  Quartz
  • Pattern Material:  2 layer CR, 3 Layer CR
  • Pellicle Frame:  Pattern Side only Stand Off= 6.3mm

Reticle Particle Checker Specification:

Detection Resolution:

  • Pattern Surface:  >0.6µm
  • Glass Surface:  15µm
  • Pellicle Surface:-  >20µm

Detection Repeatability:  >95%

  • Wafer: Size:-Standard 8” ( 6” thru 8” SEMI Standard, JEIDA,Notch / Flat, Optional)
  • Throughput: 90wph (60 shot)22mm ( 8” Wafer)
  • Throughput: 120wph (32shot)22mm ( 6” Wafer)

Environmental Chamber Specification:

  • Cleanness:  Class 1(>0.1µm)

Chamber Specifications:

  • Chamber Type:  CD111 (SMIF)
  • Air Conditioner:  Y77
  • Refrigerant:  R407C
  • Gram (g):  3500
  • Pounds (lbs):  7.716




This Canon EX6 stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide. Refurbishment lead time is estimated at 3 months. Full operational demo for buy off at our facility. We are also offering TEL ACT 8, Single Block, DUV, Coater/Developer from our stock. Turn-key Stepper/Track package can be quoted at very attractive price.

Plese contact us to discuss this, if you have near term or long term need.

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