CANON FPA-3000 EX4 DUV Stepper For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD



  • Magnification: 5:1 Reduction
  • NA: 0.4 ~ 0.6 Variable
  • Resolution: < 0.25um
  • Image Field Size: 22mm x 22mm ~ 17mm x 26mm
  • Light Source: Wavelength 248nm ; Pulse Frequency 1kHz; Power 10W
  • Reticle Size: 6" x 6",  0.25" thick
  • Wafer size: Max 8"
  • Auto-Alignment:  Off-Axis Broad-Band; Off-Axis He-Ne
  • Stage Repeatability: < 35nm
  • Dimensions: W1900 x D2600 x H2450 (mm)

Configured as:

  • Wafer size: Set for 8"
  • Wafer size conversion to 6" or  4" is available
  • Wafer Shape: Notch
  • Chuck Type: Pin Chuck or Ring Chuck
  • Number of Reticle Cassettes: 14
  • Reticle size: 6"
  • Reticle Barcode Reader
  • Cassette Barcode Reader
  • Current Software Version: V11.07A4
  • Cymer ELS-5300 KrF laser, 248nm Wavelength



This tool is being offered fully refurbished with full start up and qualification at your fab. Also includes full parts and labor warranty. 



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