CANON FPA-3000 EX3 DUV Stepper For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


Wafer: 4”, 5”, 6" or 8" (Notch or Flat)
Reticle: 6" Square

General Specification and Information:

Model: FPA 3000 EX3
First year available: 1996
Lens Type: ULEX 23
Stage Type: ABS (Air Guided Bearing)
Chamber Type: CD90

Projection Optics:
Projection Magnification: 1/5 X
Exposure Light:  248nm DUV
Numerical Aperture: 0.40 – 0.60 nm
Field Size: 22X22mm

Standard Illumination:
Exposure Light: DUV (Deep Ultra Violet
Light Source: KrF Excimer Laser (Cymer ELS-4300F)
Intensity: >2000W/m2
Uniformity: < 1.2%
Masking Blade Accuracy: Theta ≤ 3000ppm, Total ≤ 110um

Printing Performance:
Resolution: <0.25µm
Depth of Focus: >0.7 µm
Image Field Deviation:0.35 µm
Distortion: 0.045µm

Focus/Leveling Performance:
Focus Repeatability: <0.10µm (3sigma)
Leveling Repeatability: <7ppm (3sigma)

Wafer Alignment Performance:
Lighting Source: He-Ne Laser, Broad Band(Halogen Lamp)
Signal Process: TV Image Processing
System: Off Axis TTL
Mode: AGA

Standard Stage Specification:
Step Accuracy: <0.04µm (3sigma)
Scaling: <±0.5ppm
Orthogonality: <±0.5ppm

Standard Alignment Specification:
Reticle Rotation Accuracy: <±0.01µm
Wafer Alignment: <0.055µm mean + 3sigma
Reticle Rotation Repeatability: <0.02µm

Standard Size: 6" square t=0.25" ( Particle checker)
Material: Quartz
Pattern Material: 2 layer CR, 3 Layer CR
Pellicle Frame: Pattern Side only Stand Off= 6.3mm

Reticle Particle Checker Specification:

Detection Resolution
Pattern Surface: >0.6µm
Glass Surface: >15µm
Pellicle Surface: >20µm

Detection Repeatability: >95%
Wafer Size: Standard 8” ( 4” thru 8” SEMI Standard, JEIDA,Notch / Flat, Optional) Throughput: 53wph 200mm ( 8” Wafer)
Throughput: 73wph 150mm ( 6” Wafer)
Environmental Chamber Specification: N/A
Cleanness: Class 1(>0.1µm)

Chamber Specifications:
Chamber Type: CD90
Air Conditioner: Y75-8178 (TWH-301JA-A)
Refrigerant: R22
Gram (g): 5000
Pounds (lbs): 11.02

Pictures are for illustration purpose only and they are of a similar system we sold recently.



This Canon EX3 Stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide.

Refurbishment lead time is estimated at 3 months. Full operational demo for buy off at our facility.

We are also offering TEL ACT 8, Single Block, i-line, Coater/Developer from our stock.

Turn-key Stepper/Track package can be quoted at very attractive price.

Please contact us to discuss this, if you have near term or long term need.


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