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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Spare parts, functionally tested before they ship

Every part is functionally tested before shipment. Where compatible equipment is available in-house, we also test directly on our FPA-3000 stepper or CD-SEM systems.

 
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0 systems
Canon 610 Test Reticle
Ready to Ship
Serviced by GCE

Canon 610 Test Reticle

Test/Calibration Reticle, 5X

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon 735 Test Reticle
Ready to Ship
Serviced by GCE

Canon 735 Test Reticle

Focus/Resolution Reticle, 5X

Compatibility
Canon FPA-3000
Condition
New
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Canon Bar Code Reader
Ready to Ship
Serviced by GCE

Canon Bar Code Reader

Bar Code Reader for Reticle Cassette

Compatibility
Canon FPA-3000
Condition
New
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Canon BF6-2580
Ready to Ship
Serviced by GCE

Canon BF6-2580

FRA cable

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BF6-3467
Ready to Ship
Serviced by GCE

Canon BF6-3467

End Effector, 3in-4in

Compatibility
Canon FPA-3000
Condition
New
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Canon BG3-1045
Ready to Ship
Serviced by GCE

Canon BG3-1045

Ref-Mem(RT) PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG3-1050
Ready to Ship
Serviced by GCE

Canon BG3-1050

CAP4 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG3-1360
Ready to Ship
Serviced by GCE

Canon BG3-1360

Robot Controller PCB for RC

Compatibility
Canon FPA-3000
Condition
Removed from working system
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Canon BG3-1406
Ready to Ship
Serviced by GCE

Canon BG3-1406

REF-MEM PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-1407
Ready to Ship
Serviced by GCE

Canon BG3-1407

Image Processing PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG3-2090
Ready to Ship
Serviced by GCE

Canon BG3-2090

M-POS PCB-3 Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
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Canon BG3-2098
Ready to Ship
Serviced by GCE

Canon BG3-2098

Main Adopter PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
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