KLA-Tencor 8450 CD-SEM For Sale

Model Year: 2002
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


KLA-Tencor 8450 CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.

Performance Specification:
• Feature Size:  < 30 nm
• Resolution:    < 4 nm
• Electron Source: Schottky, Thermal Field Emitter
• Magnification: 2.34 kX - 400 kX
• Stage: X-Y leadscrew stage, Position Accuracy < 10 micron
• Accelerating Voltage:  0.4kV - 1.5kV
• Throughput:  upto 50 wafers/hr

Configured as follows:
• Wafer size:  8” – 12”
• Windows NT Operating System, user friendly interface
• 3 wafer loading stations
• Fully refurbished Electron Source
• Chamber pump: Edwards or Varian  dry scroll pump
• Load lock pump: Edwards or Varian dry scroll pump
• Dedicated UPS system for emergency power back up
• Power: 120V-220VAC, 1PH, 50/60HZ (suitable worldwide)

Our turnkey offering includes the following:
• The system is guaranteed to be in full compliance with original specs
• Full demonstration for pre-shipment acceptance at GCE facility
• Installation, start up, and training at customer's facility worldwide
• 3 month parts and labor warranty  (6 and 12 month warranty can be quoted)
• Unlimited support by email and phone calls


Other than KLA-Tencor, GCE is the only vendor that can provide full system refurbishment and provide continuous parts and service support for this product line. This includes refurbishment of electron source. The bottom line is substantial savings without sacrificing quality or response time.  Buy with confidence. Call us to learn more about this offering.

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