Model Year: 1997
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD


This FESEM is configured as floows:

Secondary electron image resolution: 1.5 nm at 15 kVA
Magnification: 20x – 500KX
Objective aperture: 4 position externally selectable
Stigmator: Octopole electromagnetic
Scanning Coil: 2-stage electromagnetic
Electron Optics:
Electron Gun: Cold field emission source
Lens Type: Electromagnetic
Objective Aperture: 4 position externally selectable

Sample Chamber:

Size: Type II
Airlock: Pre-pumped, max sample size: 150mm diameter
Stage Motion: 5-axis manual; X/Y: 100mm/50 mm, Z: 3-33 mm, T: -5 Deg - +60 Deg., R: 360 Deg continuous
Deben Stage Controller Option Included for Motorized Stage Control (X, Y & Rotation)
Display System:
Image Display: Dual 12” Monitors
Scanning Mode: Normal, reduced area, line scan, photo scan, spot position, split screen
Scanning Speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame
Signal Processing: Real-time processing, auto-brightness and contrast control, dynamic stigmator, autofocus
Frame averaging, frame integration, contrast conversion
Vacuum System:
Fully automatic operation with pneumatic valve control
Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber
Seiko Seiki Turbo Pump and Controller
Roughing Pump


This Instrument was fully operatonal prior to deinstallation.  It is now in storage.  We are offering it is as a complete system in as-is condition.

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