NIKON NSR-S203B DUV Scanner For Sale

Model Year:	1999
Quantity:	1
Condition:	Refurbished system
Serial No:	7776037
Availability:	Immediate

Configuration:

This wafer scanner is offered fully refurbished. GCE Market, Inc.  is the owner of this tool and are offering it WORLDWIDE with installation and 3 months parts and labor warranty.

Specifications:
•Reduction:  4x
•NA:  0.68
•Resolution:  0.18um
•Image Field Size(max): 25mm x 33mm
•Wafer size:  8"
•Reticle Size:  6" x 6",  0.25" thick
•Alignment Accuracy:40nm
•Illumination Uniformity: 1.6 %
•Auto-Leveling Accuracy: 100 nm
•Stepping Accuracy:  25nm

Configured as:
•Wafer size:  Set for 8"
•Wafer Shape:  Notch
•Number of Reticle Cassettes:  30
•Reticle size:  6"
•Alignments:  FIA, LSA, LIA
•Cymer ELS-5400 KrF laser, 248nm Wavelength
•Can be interfaced with Track system or can be used as stand alone configuration. Previously, this stepper was interfaced with TEL track system

Comments:

This tool is being offered fully refurbished with full start up and qualification at your fab anywhere WORLDWIDE. Also includes full parts and labor warranty. It is in stock and is presently undergoing refurbishment.

Whether you are a Semiconductor, Mems or Optoelectronics fab or Research Lab, if you need a DUV stepper of 0.18um resolution capability, we are very inerested in making a very attractive turn-key proposal to you.  Please contact us for further details.