KLA CDSEM
GCE is a global supplier of high quality refurbished KLA CD-SEMs, spare parts, and services at the most competitive pricing. We hold the largest inventory of KLA CD-SEMs for sale worldwide. These systems are located at our Blackwood, New Jersey lab. Our lab features a 2,500 square feet area including simultaneous refiurbishment of 5 CD-SEMs. Our experience and expertise in systems, parts, and services cover the following models: 8100, 8100E, 8100XP, 8200, 8250, 8250R, 8300, 8450.
What makes us different? We have large quantity of CD-SEMs and spare parts in stock. We have high level expert staff with long term OEM experience and each team member is a direct employee of GCE with long term committment to GCE. We have what it takes to help you achieve ROI beyond any competitive offering for new or refurbished CD-SEM. If you are thinking about purchase of a CD-SEM but not sure which model is best suited, call us. If you are not sure if KLA platform is right for you, call us. See how we can help you set up your entire CD-SEM operation better, faster, and cheaper than any other vendor. That is our guarantee to you. With over 20 systems shipped, our CDSEMs are installed in US, Germany, Russia, Taiwan, China, and Brazil.
Please see below details of each of our offerings. Each is offered refurbished with installation, training, and warranty worldwide and is guaranteed to be in full compliance with original specifications. Leadtime can vary but typically ranges in 8-10 weeks. Wafer size change or handling modifcations for GaAs, sapphire, glass, and other wafers are possible.
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Specs Summary. For details, click on the model number. |
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| KLA 8100 | KLA 8100E | KLA 8100XP | KLA 8250 | |
| Wafer Size (*) | 4" - 8" | 4" - 8" | 4" - 8" | 4" - 8" |
| Reticle size | - | - | 5" or 6" ( XPR) | - |
| Wafer Loading Stations | 3 | 3 | 3 | 3 |
| Feature Size | < 100 nm | < 30 nm | < 30 nm | < 30 nm |
| Resolution | < 4.5 nm | < 4 nm | < 4 nm | < 4 nm |
| Schottky Electron source | yes | yes | yes | yes |
| Magnification | 2.34kx - 400kx | 2.34kx - 400kx | 2.34kx - 400kx | 2.34kX - 400kx |
| Operating System | Mac | Mac or Win NT | Mac or Win NT | Win NT or XP |
| Stage Position Accuracy | < 10 um | < 10 um | < 10 um | < 1 um (Laser) |
| Accelerating Voltage | 0.4kV - 1.5kV | 0.4kV - 1.5kV | 0.4kV - 1.5kV | 0.4kV - 1.5kV |
| Throughput (8" wafers/hr) | 40 | 50 | 50 | 55 |
| * Can be calibrated to run 4"-8" wafers on the fly without any hardware change; 2"-3" require carrier | ||||
| Each station can be set up to run different size wafers | ||||
Featured KLA CDSEM Equipment
 | KLA-Tencor 8100 CD-SEM Other than KLA-Tencor, GCE is the only vendor that can provide full system refurbishment and provide continuous parts and service support for this product line. This includes refurbishment of elec |
 | KLA-Tencor 8100XP CD-SEM Other than KLA-Tencor, GCE is the only vendor that can provide full system refurbishment and provide continuous parts and service support for this product line. This includes refurbishment of elec |
 | KLA-Tencor 8100XPR CD-SEM Other than KLA-Tencor, GCE is the only vendor that can provide full system refurbishment and provide continuous parts and service support for this product line. This includes refurbishment of elec |
 | KLA-Tencor 8250 CD-SEM Other than KLA-Tencor, GCE is the only vendor that can provide full system refurbishment and provide continuous parts and service support for this product line. This includes refurbishment of elec |
 | KLA-Tencor 8300 CD-SEM Other than KLA-Tencor, GCE is the only vendor that can provide full system refurbishment and provide continuous parts and service support for this product line. This includes refurbishment of elec |
 | KLA-Tencor 8450 CD-SEM Other than KLA-Tencor, GCE is the only vendor that can provide full system refurbishment and provide continuous parts and service support for this product line. This includes refurbishment of elec |
 | KLA-Tencor Electron Source (refurbished) This offer is only available from GCE. Whether you have one KLA CDSEM or have large installed base, ask us how we can help you to reduce operating and maintenance costs. view details |
| KLA-Tencor Parts for CD-SEM systems This offer is only available from GCE. Whether you have one KLA CDSEM or have large installed base, ask us how we can help you to reduce operating and maintenance costs. view details |
In Stock KLA CDSEM Parts
- 471-12148-000 - ZYGO 7705 Laser Head (1 available)
- 720-05888-000 - TFE Gun Controller (3 available)
- 780-13181-000 - DC Distribution (3 available)
- 780-13182-000 - ET Detector Controller Chassis (2 available)
- 780-13204-000 - Schottky Electron Source Controller Chassis (3 available)
- 780-14016-000 - ISA BUS Chassis (3 available)
- 780-14020-000 - Bladder (5 available)
- 780-14091-000 - Column Control Chassis II (2 available)
- 780-14688-000 - Wien Filter Controller (3 available)
- 780-14691-000 - MCP Detector Controller (3 available)
- 780-14810-000 - Robot Controller (3 available)
- 780-17142-000 - Pre-Aligner (2 available)
- 780-17407-000 - DUAL ION Pump Controller (3 available)
- 880-05229-000 - Electron Source, Refurbished (2 available)
- 880-50510-000 - Electron Source, Refurbished (2 available)