Canon Steppers
GCE is a global supplier of high quality refurbished Canon steppers, spare parts, and services at the most competitive pricing. We hold the largest inventory of Canon i-line and DUV steppers for sale worldwide. These steppers are located in our new cleanroom lab in Livermore, California. This 10,000 square feet facility features a 3,000 square feet cleanroom with ten service bays. Our experience and expertise in systems, parts, and services cover the following Canon stepper and scanner models:
FPA 3000 i4, i5, i5+, i5++, iW, MR : I-line steppers
FPA 5500 iZ, iX, iZa : I-line steppers
FPA 3000 EX3, EX4, EX5, EX6 : DUV steppers
FPA 4000 ES1, AS1 : DUV Scanners
FPA 5000 ES2, ES2+, ES3, ES4, AS2, AS3, AS4, FS1 : DUV Scanners
FPA 6000 ES5, ES6, ES6a : DUV Scanners
FPA 7000 AS5 : DUV Scanners
What makes us different ? We have large quantity of steppers and spare parts in stock. We have best in class cleanroom facility where all stepper projects are handled. We have high level expert staff with long term OEM experience and each team member is a direct employee of GCE with long term committment to GCE. We have what it takes to help you achieve ROI beyond any competitive offering for new or refurbished steppers. If you are thinking about purchase of an i-line or DUV stepper but not sure which model is best suited, call us. If you are not sure if Canon platform is right for you, call us. See how we can help you set up your entire Stepper operation better, faster, and cheaper than any other vendor. That is our guarantee to you.
Please see below details of each of our offerings. Each is offered refurbished with installation, training, and warranty worldwide. Leadtime can vary but typically ranges in 4-10 weeks. Our i4 steppers are closer to 4 weeks and EX5 are closer to 10 weeks for fully refurbished systems. Wafer size change is no problem. Handling modifcations for non-conventional substrates like glass, sapphire, etc are possible. Please inquire for details.
Featured Canon Steppers Equipment
 | CANON FPA-3000 EX4 DUV Stepper This tool is being offered fully refurbished with full start up and qualification at your fab. Also includes full parts and labor warranty. It is in stock at our facility in Blackwood, NJ USA. We |
 | CANON FPA-3000 EX5 DUV Stepper GCE has 4 sets of Canon FPA-3000 EX5 DUV steppers in our own stock. We are offering total turnkey solution which includes:
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 | CANON FPA-3000 i4 Stepper We are offering total turnkey solution which includes: |
In Stock Canon Steppers Parts
- BF6-2162-000 - Sheet Glass (3 available)
- BG0-7821-000 - HeNe Laser Unit (3 available)
- BG3-1360-000 - ROBOT CONTROLLER (3 available)
- BG3-1407-000 - LANTERN PCB (3 available)
- BG3-2090-000 - M-POS PCB (3 available)
- BG3-2098-000 - MAIN ADAPTER PCB (3 available)
- BG3-2099-000 - CD I/F PCB (3 available)
- BG3-2189-000 - DAMPER-CD3 PCB (3 available)
- BG3-2298-000 - Low Contact Pin 8” 0/90 T2 LCP W/C (3 available)
- BG3-2455-000 - Ring 8” S1 RC W/C (3 available)
- BG3-2462-000 - Main CPU (3 available)
- BG3-2575-000 - M-Stopper Switching Unit (3 available)
- BG3-2898-000 - Masking Blade (3 available)
- BG3-3858-000 - UPS Unit, GSEE (3 available)
- BG3-5450-000 - Exposure Shutter Unit (3 available)
- BG4-2846-000 - OAS AF SENSOR AMP PCB (3 available)
- BG4-4390-000 - SYNC DET AMP PCB (3 available)
- BG4-4397-000 - RFC MV DRIVE PCB (3 available)
- BG4-4429-000 - PROCESSING 1 PCB (3 available)
- BG4-4430-000 - PROCESSING 2 PCB (3 available)
- BG4-4432-001 - CONTROLLER 2 PCB (3 available)
- BG4-4433-002 - CONTROLLER 3 PCB (3 available)
- BG4-4455-000 - MOTHER BOARD (3 available)
- BG4-5347-000 - CCD OPTF SES-PCB 2 (3 available)
- BG4-5372-000 - Laser Head (3 available)
- BG4-5421-000 - Piezo Unit (3 available)
- BG4-5459-000 - PIEZO DRV PCB ASS'Y W/IC (3 available)
- BG4-5724-000 - ROBOT CONTROLLER (3 available)
- BG4-5728-000 - RS PCB (3 available)
- BG4-5733-000 - LIBRARY SUB PCB (3 available)
- BG4-6079-000 - RPC CPU PCB (3 available)
- BG4-6405-000 - BASIS PCB (3 available)
- BG4-6456-000 - STAGE DSP PCB ASS'Y (3 available)
- BG4-6457-000 - XY STAGE PRE-AMP PCB ASS'Y (3 available)
- BG4-6459-000 - OFCD-IF PCB ASS'Y (3 available)
- BG4-6460-000 - PIEZO ANALOG PCB ASS'Y (3 available)
- BG4-6463-000 - STAGE CD PCB (3 available)
- BG4-6465-000 - MEASUREMENT PCB (X) ASS'Y (6 available)
- BG4-6466-000 - MEASUREMENT PCB (Y) ASS'Y (6 available)
- BG4-6467-000 - MEASUREMENT PCB (THETA) ASS'Y (6 available)
- BG4-6579-000 - MV CD PCB (3 available)
- BG4-6582-000 - HRD PROCESSING PCB ASS'Y (3 available)
- BG4-6590-000 - P-MOUNT CD PCB (3 available)
- BG4-6591-000 - A-MOUNT CD PCB (OPTION) (3 available)
- BG4-6603-000 - CCD OPTF CAP(2) PCB ASS'Y (3 available)
- BG4-6616-000 - I.L UNIFORMITY PRE AMP PCB (3 available)
- BG4-6626-000 - MAIN CPU PCB ASS'Y (3 available)
- BG4-6628-000 - CAM UNIT (6 available)
- BG4-6629-000 - XY STAGE CPU PCB ASS'Y (6 available)
- BG4-6631-000 - CD I/F PCB ASS'Y (3 available)
- BG4-6632-000 - TV IMAGE CPU PCB ASS'Y (3 available)
- BG4-6633-000 - BACK PLANE PCB (VISUAL) ASS'Y (3 available)
- BG4-6634-000 - BACK PLANE PCB (VME) ASS'Y (3 available)
- BG4-6673-000 - HROA CD PCB (3 available)
- BG4-6686-000 - Mirror Switching Unit (3 available)
- BG4-6690-000 - 1st Condenser Main (3 available)
- BG4-6696-000 - Collimator Lens (3 available)
- BG4-6697-000 - Mercury Lamp 2KV 2000hr (3 available)
- BG4-6699-000 - Exposure Shutter Unit (3 available)
- BG4-6703-000 - Masking Blade (3 available)
- BG4-6704-000 - IL1 C/D PCB (3 available)
- BG4-6705-000 - IL2 C/D PCB (3 available)
- BG4-6719-000 - Canon Type Library (3 available)
- BG4-6732-000 - LIBRARY CONT PCB (3 available)
- BG4-6733-000 - LIBRARY SUB PCB (3 available)
- BG4-6735-000 - Reticle Robot (3 available)
- BG4-6736-000 - Cassette Robot (3 available)
- BG4-6737-000 - 6"" Cassette Robot Hand (3 available)
- BG4-6737-00N - 6"" Nikon Type Cassette Robot Hand (3 available)
- BG4-6745-000 - RC CPU PCB (3 available)
- BG4-6746-000 - WF/RC IF PCB (3 available)
- BG4-6748-000 - P2 BACK PLANE BOARD (3 available)
- BG4-6751-000 - 6"" Reticle Robot Hand (3 available)
- BG4-6755-000 - SH PCB (3 available)
- BG4-6757-000 - 5” Notch Detector Unit (L) (3 available)
- BG4-6758-000 - 4” SEMI Detector Unit (L) (3 available)
- BG4-6759-000 - 5” SEMI Detector Unit (L) (3 available)
- BG4-6760-000 - 6” SEMI Detector Unit (L) (3 available)
- BG4-6761-000 - 8” Orientation Flat Detector (L) (3 available)
- BG4-6762-000 - 6” Notch Detector Unit (L) (3 available)
- BG4-6763-000 - 8” Notch Detector Unit (L) (3 available)
- BG4-6764-000 - 3”/4” Finger (3 available)
- BG4-6765-000 - 5” – 8” Finger (3 available)
- BG4-6777-000 - Feed Hand Unit (Type 6 L) (3 available)
- BG4-6780-000 - SCH Robot Unit (L) (3 available)
- BG4-6783-000 - WF SCH/PS PCB (3 available)
- BG4-6786-000 - WF LD/PD PCB (3 available)
- BG4-6794-000 - WF SCH/EL PCB (3 available)
- BG4-6811-000 - PA/SH PCB (3 available)
- BG4-6818-000 - CCD-DRV-PCB (3 available)
- BG4-6823-000 - WF CPU PCB (3 available)
- BG4-6844-000 - Pin 8” T2 PC W/C (3 available)
- BG4-6854-000 - Pin 8” N T2 PC W/C (3 available)
- BG4-6902-000 - ASCD (L) PCB (3 available)
- BG4-6903-000 - ASCD (R) PCB (3 available)
- BG4-6923-000 - AF SNS PCB (3 available)
- BG4-6928-000 - URS CD PCB (3 available)
- BG4-6943-000 - ALS-CD PCB (3 available)
- BG4-6973-000 - Lamp power supply (6 available)
- BG4-6974-000 - E-CD PCB (3 available)
- BG4-6975-000 - E-CD PCB (3 available)
- BG4-7001-000 - RS232 SWITCHING UNIT (6 available)
- BG4-7082-000 - Lamp power supply (3 available)
- BG4-7184-000 - MOTOR PCB (3 available)
- BG4-7266-000 - Standard cassette Barcode Reader (3 available)
- BG4-7267-000 - 6” Reticle Standard Barcode Reader (3 available)
- BG4-7329-000 - PPC PCB (6 available)
- BG4-7432-000 - CONTROLLER 1 PCB (3 available)
- BG4-7476-000 - 5"" Reticle Robots (3 available)
- BG4-7477-000 - 5” R/C cassette Robot (3 available)
- BG4-7504-000 - 5” Notch Detector Unit (R) (3 available)
- BG4-7505-000 - 4” SEMI Detector Unit (R) (3 available)
- BG4-7506-000 - 5” SEMI Detector Unit (R) (3 available)
- BG4-7507-000 - 6” SEMI Detector Unit (R) (3 available)
- BG4-7508-000 - 6” Notch Detector Unit (R) (3 available)
- BG4-7509-000 - 8” Orientation Flat Detector (R) (3 available)
- BG4-7510-000 - 8” Notch Detector Unit (R) (3 available)
- BG4-7518-000 - Feed Hand Unit (Type 6 R) (3 available)
- BG4-7521-000 - SCH Robot Unit (R) (3 available)
- BG4-7590-000 - Nikon Type Library (3 available)
- BG4-7600-000 - Nikon-Compliant Reticle Barcode Reader (3 available)
- BG4-7785-000 - CCD OPTF SENSOR PCB (3) (3 available)
- BG4-7840-000 - MOTOR PCB (3 available)
- BG4-7928-000 - Ring 8” N T2 RC W/C (3 available)
- BG4-7932-000 - Ring 8” T2 RC W/C (3 available)
- BG4-7936-000 - IL PRE-AMP PCB (3 available)
- BG4-7937-000 - CCD OPTF CAP (2) PCB (3 available)
- BG4-7938-000 - HROA-CD(W) PCB (3 available)
- BG4-7964-000 - A STOP PCB (3 available)
- BG4-8140-000 - 2CH PAE- PROCESSING PCB (3 available)
- BG4-8141-000 - 2CH PAE- PROCESSING PCB (3 available)
- BG4-8192-000 - INTERMEDIATE LIBRARY CONTROL (3 available)
- BG4-8193-000 - LIBRARY ELEVATOR CONT PCB (3 available)
- BG4-8194-000 - LIBRARY SUB PCB (3 available)
- BG4-8546-000 - IL3-CD PCB (3 available)
- BG4-8591-000 - EASLCD PCB (3 available)
- BG4-8592-000 - EASRCD PCB (3 available)
- BG4-8616-000 - A-AMP PCB (3 available)
- BG4-8680-000 - EXPO-CD PCB (3 available)
- BG4-8705-000 - MV-CD PCB (3 available)
- BG4-8815-000 - CDIF2 PCB (3 available)
- BG4-8835-000 - URS-CD PCB (3 available)
- BG4-9150-000 - BACK PLANE PCB (VME) (3 available)
- BG4-9151-000 - FZANA IF PCB (3 available)
- BG4-9152-000 - X-Y STAGE PIPING PCB (3 available)
- BG4-9171-000 - AC/ DC power suppy unit (3 available)
- BG4-9175-000 - MLE-I/F PCB (3 available)
- BG4-9191-000 - XY PRE-AMP2 PCB (3 available)
- BG4-9217-000 - STAGE DSP CPU (3 available)
- BG4-9306-000 - Pin 8” 0/90 T2 PC W/C (3 available)
- BG4-9307-000 - CAP 3 PCB (3 available)
- BG4-9745-000 - OFCD-I/F PCB (3 available)
- BG9-3500-000 - ADP-2 PCB (3 available)
- BG9-3501-000 - IMP-2 I/F PCB (3 available)
- BG9-4085-000 - ACC-1 (1)PCB (3 available)
- BH5-3522-000 - UPS Unit, GSEE (3 available)
- BH5-7744-000 - SCSI EXTENDER PCB (3 available)
- BH5-7919-000 - SCSI EXTENDER PCB (3 available)
- BN9-2310-000 - ND Filter (4%) (3 available)
- BN9-2717-000 - Sheet Glass (3 available)
- BN9-6634-000 - Sub I-Line Filter (AA/FRA) (3 available)
- BN9-6635-000 - I-Line Filter (AA/FRA) (3 available)
- BN9-7405-000 - Bending Mirror (3 available)
- BN9-7407-000 - Ellipsoidal Mirror (3 available)
- BN9-7513-000 - I-Line Filter (3 available)
- BN9-7775-000 - Glass Cover (3 available)
- BY9-9199-000 - Tilt Stage Adjustment Tool (3 available)
- BY9-9200-000 - Tilt Stage Adjustment Tool (3 available)
- BY9-9451-000 - Tilt stage Retainer Cage Reseat (3 available)
- WG1-0453-000 - Halogen Lamp (3 available)
- WG8-5304-000 000 - PHOTO SENSOR, Reticle Detection Sensor (1 available)
- WL9-5008-000 - DRIVER PLUSE MOTOR (3 available)
- Y60-0812-000 - Z Drive Ballscrew (3 available)
- Y60-0862-000 - 1st Condenser Lens (1) (3 available)
- Y60-0863-000 - 1st Condenser Lens (2) (3 available)
- Y60-0866-000 - Flys Eyes Lens Unit (3 available)
- Y60-0869-000 - 2nd Condenser Lens (3 available)
- Y60-1010-000 - Glass Cover Unit (3 available)
- Y60-1221-000 - 2nd Condenser Zoom Lens Unit (3 available)
- Y60-1301-000 - 3rd Condenser Lens (3 available)
- Y75-4102-000 - Galaden HT110 Coolant (3 available)
- Y75-5183-000 - Mercury Lamp 2KV 1500hr (3 available)