AIXTRON G5 WW C Planetary Reactor For Sale

Model Year:	2022
Quantity:	1
Condition:	New
Serial No:	1001703380
Availability:	Immediate

Configuration:

AIX GS WW C Planetary Reactor for deposition on 8 x150 mm wafers

Computer control system
MES interface SECS II/GEM for MOVPE systems (incl. router)


GAS HANDLING SYSTEM
Standard metalorganic channel [MOG1] with 2 LOTO hand valves as customer interface; bubbler placed outside GMS cabinet
(1xTCS)

Combined standard and dilution metalorganic channel
[MOG1/G3-D]
(2xTMAI)

Standard gas channel with pusher, for low flow
[MOG2]
(1xNN, 1xHCI)

Triple-Cascading standard gas channel with pusher
[MOG2-T]
(3xC3H8)

Combined standard and dilution/dopant gas channel
[MOG2/G4-D]
(2xN2)

Additional pusher for MO-G4
(1xN2)

Carrier gas channel (Dummy line) for balancing gas flow switching
(1xR/V Center, 1xR/V Bottom)

MO-differential run/vent pressure balancing
(1xMO, 1xR/V center)

MO-Vac High Pressure Purge

Epison 5
(1xTCS)



PROCESS CONTROL
EpiCurve TT® AR 3W
Automatic Feed Forward incl. Autosat


GAS PURIFICATION
Spare provision for standard purifier HCI
Spare provision for standard purifier (C3H8)
Single Port Hygrometer incl. valve and housing (H2/N2))
Ar limiter


AUTOMATION
Automatic  Cassette to Cassette wafer handler for high temperature operation (600C)

 

Comments:

This reactor is brand new. Just delivered and installed at a US based facility. Due to change in process, the user is willing to sell this reactor.

Please contact us for details !
 

General information and option for this type of reactor can be found on OEM's website link below:

https://www.aixtron.com/en/products/AIX%20G5%20WW%20C_p1333