AIXTRON 200 R2 (As/P) MOCVD For Sale

Model Year: 1990
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD

Configuration:

  • As/P configuration
  • Throughput:  3 x 2"
  • Uses Heater Lamp
  • Gases used: Arsine, Phosphine, Silane, Hydrogen
  • Contains 5 MO baths
  • MO Used: TMA, TMG, TMI, CBR4
  • Pump: Leybold Trivac D65BCS
  • System Manual included (hard copy only)
  • Computer controller (not functional)
  • Hydrogen Purifier (not included)
 

Comments:

The reactor is installed in cleanroom but has been powered down.

If you are interested in this system, please contact us to further discuss.

 

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