MRC 643 Sputtering system (Systech) For Sale

Model Year:	2001
Quantity:	1
Condition:	Excellent operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

MRC 643 Side Sputtering System

Configured for Ultra-high purity deposition

Fully refurbished and automated by Systech (in 2001) as a high purity sputtering system with a cryo pumped load-lock (CTI-8)

Fully automated, touch-screen graphical user interface

3 DC targets, several spare targets (aluminum, titanium etc.) and cathodes (Angstrom etc.)

RF sputter etch station

13 inch by 13 inch pallet size

Quartz heaters in load lock for baking out wafers

Vacuum Equipment:
 • Main chamber pump: CTI-10
 • Load lock pump: CTI-8
 • Roughing: Edwards 80
 • Cryo Compressor: CTI-Cryogenics

ENI OEM-12A RF power supply
Advance Energy MDX-10K DC power supply

Comments:

This Sputter tool is in excellent operating condition. Full demonstration can be arranged for serious inquiries.