DSG AXOM-100/150 For Sale

Model Year:	N/A
Quantity:	2
Condition:	Good operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

DSG AXOM 100/150 Microwave System for Low Thermal Wafer Processing

Features:
 Variable Frequency Microwave heating (C-band)
 Temperature Operating Range: 25 < T < 600 °C
 Batch size up to 50 wafers (4”, 6”, 8’’ feasible)
 Power controlled tool with temperature measurement

Applications:
 Silicide formation
 Low tempature anneal and activation of dopants
 Contact formation

Specifications:
 System Dimension: 1195 mm (Width) x 2170 mm (Depth) x 2150 mm (Height)
 System Weight approx. 450 kg
 Main Electrical Power: 400 VAC, 3Phase, 60 A max
 Exhausts: Main Cabinet 3000 L/min 6”, Gas cabinet 1500 L/min 3”, Process exhaust
 Cooling water 18…20°C, flow 15L/min
 Inlet gas pressure: 40 psi < p < 100psi
 Pneumatic pressure 90 psi + 10psi (Clean dry air or HP N2)
 Gas inlets:
 Tool 1: N2 (20slm MFC), N2O (10slm), O2 (10slm), 1 spare
 Tool 2: N2 (20slm MFC), N2O (10slm), O2 (10slm), Ar (10slm)

Comments:

Good operational systems.  Available for inspection.