KDF 643NT In-Line Sputtering Tool For Sale

Model Year:	2001
Quantity:	1
Condition:	Complete system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Configured for 4" and 6"

Windows NT computer controller

High Vacuum Loadlock

3 Targets capability with Heat Lamps.

Cathodes:
#1: AL - "MU" Inset
#2: W/Ti 10%, Planar
#3: AU, Inset

Advanced Energy MDX Pinnacle DC Magnetran Drive

Advanced Energy MX-500 DC Power Supply

Advanced Energy RFX-II 1250 (13.56MHz) RF Power Supply

Brooks Techware II controller

2 MKS Type 146 Vacuum Gauges

CTI 9600 Cryogenic Compressor

Edwards QDP Dry Pump

Comments:

This system is available for immediate purchase in as-is condition or in refubished condition with 3 months parts warranty. Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request.
 
Please contact us, for more details and price quote.