ULVAC ei-5 For Sale

Model Year:	2006
Quantity:	1
Condition:	Excellent operational condition
Serial No:	MA05-9801
Availability:	immediate

Configuration:

ULVAC ei - 5 e-Beam evaporation system

E-Gun: EGO-40M ( 4pc x 40ccm) from ULVAC
Heating System: 4 x quarz heater ( max. 350 °C substrate temperature)
Film thickness measurement: 2 pocket X-tal controller CRTM-9000
Wafer sizes: Calotte's ( inlay ring system) for 2 inch and 4 inch available
Gas lines : MFC 100 sccm for O2 -Gasline
Control System: Computer controlled application software with a easy GUI ( Monitor with touchscreen)

Cryo pump U16P (ULVAC)
Rough pump not included

Comments:

This ebeam evaporation system is installed and is in excellent operational condition at our customer's fab in Europe.  If you are interested in more details or would like to inspect the tool, please contact us.