AIXTRON 2400/G3 (As/P) MOCVD For Sale

Model Year: N/A
Quantity: 1
Condition: Good operational condition
Serial No: Available upon request
Availability: SOLD

Configuration:

Aixtron 2400/G3 AsP Mocvd Reactor
 
Throughput:  8x2"   OR  8x3"   OR 5x4"

Gas lines: 
2 x PH3
2 x AsH3
1 x SiH4
1 x H2S
1 x HCl
 
MO sources:
2 x TMG
2 x TMI
2 x TMA
1 x TMI
1 x DEZn
1 x CpFe
 
Gas flow diagrams available upon request


Comments:

 

  • The reactor is installed and fully operational
  • For serious inquiries, operational demonstration can be arranged